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ISO/TS 21383:2021

ISO/TS 21383:2021

Microbeam analysis — Scanning electron microscopy — Qualification of the scanning electron microscope for quantitative measurements

Analyse par microfaisceaux - Microscopie électronique à balayage - Qualification du microscope électronique à balayage pour des mesures quantitatives

Date:
2021-03-12 / Published
ICS:

37.020 - Optical equipment. Including microscopes, telescopes, binoculars, optical materials, optical components and optical systems

Committee:
ISO/TC 202/SC 4 - Scanning electron microscopy

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