ISO 14644-9:2022

Cleanrooms and associated controlled environments — Part 9: Assessment of surface cleanliness for particle concentration

Salles propres et environnements maîtrisés apparentés — Partie 9: Évaluation de la propreté des surfaces en fonction de la concentration de particules

Date:

2022-05-09 / Published

ICS:

13.040.35 - Cleanrooms and associated controlled environments.

Committee:

ISO/TC 209 - Cleanrooms and associated controlled environments

Relación con otras normas ISO:

Anula a: ISO 14644-9:2012

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