IEC 62047-1:2005

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

Dispositifs à semiconducteurs - Dispositifs microélectromécaniques - Partie 1: Termes et définitions

Date:

2016-01-06 /Anulada

Summary (English):

This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.

Summary (French):

Relaciones con otras normas IEC

This standard is available in:

Digital format

Bilingue