ISO/TS 20175:2018

Vacuum technology — Vacuum gauges — Characterization of quadrupole mass spectrometers for partial pressure measurement

Technique du vide — Manomètres à vide — Description des spectromètres de masse quadripolaires pour mesurage de la pression partielle

Date:

2018-05-03 / Published

ICS:

Committee:

ISO/TC 112 - Vacuum technology

This standard is available in:

Digital format

Ingles