IEC 62047-1:2016

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

Dispositifs à semiconducteurs - Dispositifs microélectromécaniques - Partie 1: Termes et définitions

Date:

2016-01-06 /Vigente

Summary (English):

IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition: a) removal of ten terms; b) revision of twelve terms; c) addition of sixteen new terms.

Summary (French):

Relaciones con otras normas IEC

Anula a: IEC 62047-1:2005

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